{"id":75167,"date":"2025-07-31T10:11:29","date_gmt":"2025-07-31T08:11:29","guid":{"rendered":"https:\/\/www.accretech.eu\/?page_id=75167"},"modified":"2025-07-31T10:11:29","modified_gmt":"2025-07-31T08:11:29","slug":"luftkuehlsystem-arts-hs-3","status":"publish","type":"page","link":"https:\/\/www.accretech.eu\/de\/produkte\/semiconductor\/wafer-probing-maschinen\/luftkuehlsystem-arts-hs-3\/","title":{"rendered":"Luftk\u00fchlsystem ARTS-HS-III"},"content":{"rendered":"<\/div><\/div><\/div><!-- close content main div --><\/div><\/div><div id='standard-grid'  class='av-layout-grid-container av-11mnlnd-20d0dde989b4969720c24e9bc290769b entry-content-wrapper main_color av-flex-cells  container_wrap fullsize'  >\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-z2w9w9-fcb5d5ac300cc2393141534699769465\">\n.flex_cell.av-z2w9w9-fcb5d5ac300cc2393141534699769465{\nvertical-align:top;\n}\n.responsive #top #wrap_all .flex_cell.av-z2w9w9-fcb5d5ac300cc2393141534699769465{\npadding:0px 20px 0px 0px !important;\n}\n<\/style>\n<div class='flex_cell av-z2w9w9-fcb5d5ac300cc2393141534699769465 av-gridrow-cell av_one_half no_margin' ><div class='flex_cell_inner'><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ygxdo9-6a7c3f1a6778056f495c0a8ace65a7ca\">\n.flex_column.av-ygxdo9-6a7c3f1a6778056f495c0a8ace65a7ca{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div class='flex_column av-ygxdo9-6a7c3f1a6778056f495c0a8ace65a7ca av_one_full first no_margin flex_column_div av-zero-column-padding '     ><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-v8wuqh-31a3c880d8de9357f5aa7b99b967a87b\">\n#top .flex_column.av-v8wuqh-31a3c880d8de9357f5aa7b99b967a87b{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n.flex_column.av-v8wuqh-31a3c880d8de9357f5aa7b99b967a87b{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n.responsive #top #wrap_all .flex_column.av-v8wuqh-31a3c880d8de9357f5aa7b99b967a87b{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n<\/style>\n<div class='flex_column av-v8wuqh-31a3c880d8de9357f5aa7b99b967a87b av_one_full first no_margin flex_column_div av-zero-column-padding '     ><section  class='av_textblock_section av-sahemx-18927a620f4e619e7f3ad6bc65ba02cd'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h1><span style=\"color: #154194; font-size: 36px; font-family: frutiger;\">Effizientes Luftgek\u00fchltes K\u00fchlsystem f\u00fcr Wafer-Prober<\/span><\/h1>\n<h2>ARTS-HS-III: Perfekte Kontrolle der Temperatur bei Wafer-Pr\u00fcfungen ohne die Notwendigkeit von externen K\u00fchlquellen<\/h2>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-mcd535i4-83fb370e21364348ba73ad0bb82db846'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Das ARTS-HS-III K\u00fchlsystem bietet eine zuverl\u00e4ssige und konstante Temperaturregelung f\u00fcr Wafer-Prober. Mit einem breiten Temperaturbereich von -55\u00b0C bis +200\u00b0C erm\u00f6glicht es die pr\u00e4zise Steuerung der Chuck-Temperatur und schafft so ideale Bedingungen f\u00fcr hochgenaue Wafer-Pr\u00fcfungen in der Halbleiterfertigung.<\/p>\n<p>Dieses Luftgek\u00fchlte System kommt ohne externes K\u00fchlwasser aus und vereinfacht dadurch die Installation und Wartung. Der Inverter-gesteuerte K\u00fchlmechanismus sorgt f\u00fcr eine schnelle und energieeffiziente Temperaturregelung, die f\u00fcr anspruchsvolle Pr\u00fcfprozesse erforderlich ist.<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mcd54243-ee406ac14b4090454b152e2fe205c70a\">\n#top .hr.hr-invisible.av-mcd54243-ee406ac14b4090454b152e2fe205c70a{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-mcd54243-ee406ac14b4090454b152e2fe205c70a hr-invisible'><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3jx6hs-bb3c61c1048ff3d92fcfc29f70140e5c\">\n#top .flex_column.av-3jx6hs-bb3c61c1048ff3d92fcfc29f70140e5c{\nmargin-top:0px;\nmargin-bottom:20px;\n}\n.flex_column.av-3jx6hs-bb3c61c1048ff3d92fcfc29f70140e5c{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n.responsive #top #wrap_all .flex_column.av-3jx6hs-bb3c61c1048ff3d92fcfc29f70140e5c{\nmargin-top:0px;\nmargin-bottom:20px;\n}\n<\/style>\n<div class='flex_column av-3jx6hs-bb3c61c1048ff3d92fcfc29f70140e5c av_four_fifth first flex_column_div av-zero-column-padding '     ><p><div  class='avia-button-wrap av-22eb7k-c25ba24924a9fc6b842fdffd260831db-wrap avia-button-left  new-home-button-big custom-icon'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-22eb7k-c25ba24924a9fc6b842fdffd260831db\">\n#top #wrap_all .avia-button.av-22eb7k-c25ba24924a9fc6b842fdffd260831db{\nbackground-color:#154194;\nborder-color:#154194;\ncolor:#ffffff;\n-webkit-transition:all 0.4s ease-in-out;\n-moz-transition:all 0.4s ease-in-out;\n-ms-transition:all 0.4s ease-in-out;\n-o-transition:all 0.4s ease-in-out;\ntransition:all 0.4s ease-in-out;\n}\n<\/style>\n<a href='#kontaktformular' class='avia-button av-22eb7k-c25ba24924a9fc6b842fdffd260831db avia-icon_select-yes-left-icon avia-size-large avia-position-left' target=\"_blank\" rel=\"noopener noreferrer\"><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' >Mehr Informationen zu ARTS-HS-III anfragen<\/span><\/a><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mcd552ej-08e9bece48e25cbe2270c2f6d7eb42c8\">\n#top .hr.hr-invisible.av-mcd552ej-08e9bece48e25cbe2270c2f6d7eb42c8{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-mcd552ej-08e9bece48e25cbe2270c2f6d7eb42c8 hr-invisible'><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fu9fkp-c8b743e40d34780dd7a76d1462ff0993\">\n#top .flex_column.av-fu9fkp-c8b743e40d34780dd7a76d1462ff0993{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n.flex_column.av-fu9fkp-c8b743e40d34780dd7a76d1462ff0993{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n.responsive #top #wrap_all .flex_column.av-fu9fkp-c8b743e40d34780dd7a76d1462ff0993{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n<\/style>\n<div class='flex_column av-fu9fkp-c8b743e40d34780dd7a76d1462ff0993 av_one_full first no_margin flex_column_div av-zero-column-padding '     ><section  class='av_textblock_section av-dz0qih-7efba01699c36d427c2e82e486944e03'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Schl\u00fcsselfunktionen des ARTS-HS-III Systems:<\/h3>\n<ul>\n<li><strong>Breiter Temperaturbereich:<\/strong> Bietet eine pr\u00e4zise Kontrolle der Chuck-Temperatur im Bereich von -55\u00b0C bis +200\u00b0C f\u00fcr stabilisierte Wafer-Tests.<\/li>\n<li><strong>Luftgek\u00fchlte Technologie:<\/strong> Keine Notwendigkeit f\u00fcr externe K\u00fchlmittel, was den Wartungsaufwand reduziert und die Flexibilit\u00e4t erh\u00f6ht.<\/li>\n<li><strong>Energieeffizienz:<\/strong> Dank der Inverter-gesteuerten K\u00fchlung und Kreislauffl\u00fcssigkeitsr\u00fcckgewinnung wird der Energieverbrauch optimiert.<\/li>\n<li><strong>Luftsp\u00fclsteuerung:<\/strong> Erm\u00f6glicht eine bessere Kontrolle der Luftbedingungen rund um den Wafer-Prober f\u00fcr pr\u00e4zisere Testergebnisse.<\/li>\n<li><strong>Vielseitige Kompatibilit\u00e4t:<\/strong> Das System ist mit verschiedenen Wafer-Prober-Modellen kompatibel, sodass es an unterschiedliche Anforderungen in der Halbleiterproduktion angepasst werden kann.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2lvqicg-f2cca9edc1e1a7abc4a551c281ef298e\">\n#top .flex_column.av-2lvqicg-f2cca9edc1e1a7abc4a551c281ef298e{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n.flex_column.av-2lvqicg-f2cca9edc1e1a7abc4a551c281ef298e{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n.responsive #top #wrap_all .flex_column.av-2lvqicg-f2cca9edc1e1a7abc4a551c281ef298e{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n<\/style>\n<div class='flex_column av-2lvqicg-f2cca9edc1e1a7abc4a551c281ef298e av_one_full first no_margin flex_column_div av-zero-column-padding '     ><section  class='av_textblock_section av-mcd5czd4-adf6076a9c4d9e7371bdf7bbcf22a3af'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Maximieren Sie die Effizienz Ihrer Wafer-Pr\u00fcfungen mit dem ARTS-HS-III K\u00fchlsystem<\/h3>\n<p>Nutzen Sie die Vorteile des ARTS-HS-III Systems, um die Qualit\u00e4t Ihrer Wafer-Pr\u00fcfungen zu optimieren und gleichzeitig von einer einfacheren Wartung und einem geringeren Energieverbrauch zu profitieren.<\/p>\n<p>Erfahren Sie mehr \u00fcber dieses hochmoderne Luftgek\u00fchlte K\u00fchlsystem und wie es Ihre Produktionsprozesse in der Halbleiterindustrie verbessern kann.<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mcd5hsl5-f8a5c5d1797c9f4b046e3b023d30df6b\">\n#top .flex_column.av-mcd5hsl5-f8a5c5d1797c9f4b046e3b023d30df6b{\nmargin-top:20px;\nmargin-bottom:0px;\n}\n.flex_column.av-mcd5hsl5-f8a5c5d1797c9f4b046e3b023d30df6b{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n.responsive #top #wrap_all .flex_column.av-mcd5hsl5-f8a5c5d1797c9f4b046e3b023d30df6b{\nmargin-top:20px;\nmargin-bottom:0px;\n}\n<\/style>\n<div class='flex_column av-mcd5hsl5-f8a5c5d1797c9f4b046e3b023d30df6b av_four_fifth first flex_column_div 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class='avia_iconbox_title' >Mehr Informationen zu ARTS-HS-III anfragen<\/span><\/a><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-z3jdr4-797278e0239ebc007678882529167328\">\n#top .hr.hr-invisible.av-z3jdr4-797278e0239ebc007678882529167328{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-z3jdr4-797278e0239ebc007678882529167328 hr-invisible'><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p><\/div><\/p>\n<\/div><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-znocp-3331f4c0e1589c7aea16b3ae7c05721e\">\n.flex_cell.av-znocp-3331f4c0e1589c7aea16b3ae7c05721e{\nvertical-align:top;\n}\n.responsive #top #wrap_all .flex_cell.av-znocp-3331f4c0e1589c7aea16b3ae7c05721e{\npadding:15px 0px 0px 0px !important;\n}\n<\/style>\n<div class='flex_cell av-znocp-3331f4c0e1589c7aea16b3ae7c05721e av-gridrow-cell av_one_half no_margin' ><div class='flex_cell_inner'><p><div 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