{"id":75455,"date":"2025-07-02T15:45:44","date_gmt":"2025-07-02T13:45:44","guid":{"rendered":"https:\/\/www.accretech.eu\/?page_id=75455"},"modified":"2025-08-07T10:57:48","modified_gmt":"2025-08-07T08:57:48","slug":"co2-add-on-system-td2a-3s-td1a-s","status":"publish","type":"page","link":"https:\/\/www.accretech.eu\/en\/products\/semiconductor\/wafer-dicing-machines\/co2-add-on-system-td2a-3s-td1a-s\/","title":{"rendered":"CO\u2082 Add-On System TD2A-3S \/ TD1A-S"},"content":{"rendered":"<\/div><\/div><\/div><!-- close content main div --><\/div><\/div><div id='standard-grid'  class='av-layout-grid-container av-11xzmup-5268cf3105d6947292bd05bd8aa29dd3 entry-content-wrapper main_color av-flex-cells  container_wrap fullsize'  >\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-zhi6xd-7311eb5fa196e2a855777b350fed5849\">\n.flex_cell.av-zhi6xd-7311eb5fa196e2a855777b350fed5849{\nvertical-align:top;\n}\n.responsive #top #wrap_all .flex_cell.av-zhi6xd-7311eb5fa196e2a855777b350fed5849{\npadding:0px 20px 0px 0px !important;\n}\n<\/style>\n<div class='flex_cell av-zhi6xd-7311eb5fa196e2a855777b350fed5849 av-gridrow-cell av_one_half no_margin' ><div class='flex_cell_inner'><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-yl6cs1-71c36efc8285e24c85ff6cd8f9a105fc\">\n.flex_column.av-yl6cs1-71c36efc8285e24c85ff6cd8f9a105fc{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div class='flex_column av-yl6cs1-71c36efc8285e24c85ff6cd8f9a105fc av_one_full first no_margin flex_column_div av-zero-column-padding '     ><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2zz51t-8d860ea9dcdb420a193b0ee30933d57f\">\n#top .flex_column.av-2zz51t-8d860ea9dcdb420a193b0ee30933d57f{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n.flex_column.av-2zz51t-8d860ea9dcdb420a193b0ee30933d57f{\n-webkit-border-radius:0px 0px 0px 0px;\n-moz-border-radius:0px 0px 0px 0px;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n.responsive #top #wrap_all .flex_column.av-2zz51t-8d860ea9dcdb420a193b0ee30933d57f{\nmargin-top:30px;\nmargin-bottom:0px;\n}\n<\/style>\n<div class='flex_column av-2zz51t-8d860ea9dcdb420a193b0ee30933d57f av_one_full first no_margin flex_column_div av-zero-column-padding '     ><section  class='av_textblock_section av-ti6zpt-c247ac120112d9120f50264bbcfaafb6'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h1><span style=\"color: #154194; font-size: 36px; font-family: frutiger;\">Precise CO\u2082 Injection for Resistivity Control in Ultrapure Water<\/span><\/h1>\n<h2>The TD2A-3S \/ TD1A-S CO\u2082 Add-On System enables stable, low-maintenance control of water resistivity in the dicing process \u2013 compact, reliable, and easily integrable.<\/h2>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-rfp8i9-fd0ea5a4d6ae7df31bfbcce1d1eefd68'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>The TD2A-3S \/ TD1A-S CO\u2082 Add-On System enables controlled injection of small amounts of CO\u2082 gas into ultrapure water. Through a specialized hollow fiber membrane, the gas is efficiently dissolved, allowing precise adjustment of the water\u2019s specific resistivity. This supports stable dicing operations and helps mitigate risks such as electrostatic discharge (ESD) and particle adhesion on the workpiece.<\/p>\n<\/div><\/section><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_hr-50edc9949d927eab467680f201044eec\">\n#top .hr.hr-invisible.av-av_hr-50edc9949d927eab467680f201044eec{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-av_hr-50edc9949d927eab467680f201044eec hr-invisible'><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p><\/div><div class='flex_column av-1sijfx7-30e33eae727bd303adf65c2c46da00f2 av_one_full first flex_column_div '     ><p><div  class='avia-button-wrap av-mdws4pt8-659df9c52182c72c86e641edab53693b-wrap avia-button-left  new-home-button-big custom-icon'><a href='#kontaktformular'  class='avia-button av-mdws4pt8-659df9c52182c72c86e641edab53693b avia-icon_select-yes-left-icon avia-size-large avia-position-left avia-color-theme-color'  ><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' >Request more information about TD2A-3S \/ TD1A-S<\/span><\/a><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mdws4xym-24b0b0f8b7ea49eadb7d167c66504246\">\n#top .hr.hr-invisible.av-mdws4xym-24b0b0f8b7ea49eadb7d167c66504246{\nheight:25px;\n}\n<\/style>\n<div  class='hr av-mdws4xym-24b0b0f8b7ea49eadb7d167c66504246 hr-invisible'><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p><\/div><div class='flex_column av-1wmb89n-a76eaf80bc5319c56d50e63b1c85ea0c av_one_full first flex_column_div '     ><section  class='av_textblock_section av-mdws3qx8-5f071d7122b063c4005ef99ab8d1fef0'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Features and Benefits of the CO\u2082 Add-On System:<\/h3>\n<ul>\n<li>Rugged design with no complex mechanics \u2013 high reliability and low failure rates<\/li>\n<li>Stable and easy resistivity control via an innovative piping layout<\/li>\n<li>Durable CO\u2082 gas module \u2013 minimizes maintenance requirements<\/li>\n<li>Compact footprint \u2013 can be integrated directly into dicing systems<\/li>\n<li>Real-time monitoring of water quality via an integrated resistivity sensor<\/li>\n<\/ul>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-mdx1bz5c-3514ccfcf5de0b2a35360d7373f417cd'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Technical Specifications:<\/h3>\n<ul>\n<li>Flow rate:\n<ul>\n<li>TD2A-3S: 10 to 25 L\/min<\/li>\n<li>TD1A-S: 1 to 16 L\/min<\/li>\n<\/ul>\n<\/li>\n<li>Adjustable resistivity range:\n<ul>\n<li>TD2A-3S: 0.3 to 1.0 M\u03a9\u00b7cm<\/li>\n<li>TD1A-S: 0.1 to 1.0 M\u03a9\u00b7cm<\/li>\n<\/ul>\n<\/li>\n<li>Max. ultrapure water pressure: 0.5 MPa<\/li>\n<li>Operating temperature of ultrapure water: 20 to 25\u202f\u00b0C<\/li>\n<li>Dimensions (W \u00d7 H \u00d7 D): 90 \u00d7 335 \u00d7 300 mm<\/li>\n<li>Weight (dry): 8 kg<\/li>\n<li>Note: Depending on configuration, external installation outside the dicing unit is also possible.<\/li>\n<\/ul>\n<p>Request a consultation to optimally integrate the CO\u2082 Add-On System into your dicing workflow.<\/p>\n<\/div><\/section><\/p><\/div><div class='flex_column av-av_one_full-7714eba142aeda1f8b5272a3c372b279 av_one_full first flex_column_div '     ><p><div  class='avia-button-wrap av-mdx1c9kg-8eeb577915e0d92c1d1e81303d46373c-wrap avia-button-left  new-home-button-big custom-icon'><a href='#kontaktformular'  class='avia-button av-mdx1c9kg-8eeb577915e0d92c1d1e81303d46373c avia-icon_select-yes-left-icon avia-size-large avia-position-left avia-color-theme-color'  ><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' 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