Precise CO₂ Injection for Resistivity Control in Ultrapure Water
The TD2A-3S / TD1A-S CO₂ Add-On System enables stable, low-maintenance control of water resistivity in the dicing process – compact, reliable, and easily integrable.
The TD2A-3S / TD1A-S CO₂ Add-On System enables controlled injection of small amounts of CO₂ gas into ultrapure water. Through a specialized hollow fiber membrane, the gas is efficiently dissolved, allowing precise adjustment of the water’s specific resistivity. This supports stable dicing operations and helps mitigate risks such as electrostatic discharge (ESD) and particle adhesion on the workpiece.
Features and Benefits of the CO₂ Add-On System:
- Rugged design with no complex mechanics – high reliability and low failure rates
- Stable and easy resistivity control via an innovative piping layout
- Durable CO₂ gas module – minimizes maintenance requirements
- Compact footprint – can be integrated directly into dicing systems
- Real-time monitoring of water quality via an integrated resistivity sensor
Technical Specifications:
- Flow rate:
- TD2A-3S: 10 to 25 L/min
- TD1A-S: 1 to 16 L/min
- Adjustable resistivity range:
- TD2A-3S: 0.3 to 1.0 MΩ·cm
- TD1A-S: 0.1 to 1.0 MΩ·cm
- Max. ultrapure water pressure: 0.5 MPa
- Operating temperature of ultrapure water: 20 to 25 °C
- Dimensions (W × H × D): 90 × 335 × 300 mm
- Weight (dry): 8 kg
- Note: Depending on configuration, external installation outside the dicing unit is also possible.
Request a consultation to optimally integrate the CO₂ Add-On System into your dicing workflow.
