Efficient Air-Cooled Cooling System for Wafer Probers
ARTS-HS-III: Perfect Temperature Control for Wafer Testing Without the Need for External Cooling Sources
The ARTS-HS-III cooling system provides reliable and consistent temperature control for wafer probers. With a wide temperature range from -55°C to +200°C, it enables precise control of chuck temperature, creating ideal conditions for high-precision wafer testing in semiconductor manufacturing.
This air-cooled system operates without the need for external cooling water, simplifying both installation and maintenance. The inverter-controlled cooling mechanism ensures rapid and energy-efficient temperature regulation, which is essential for demanding testing processes.
Key Features of the ARTS-HS-III System:
- Wide Temperature Range: Provides precise control of chuck temperature from -55°C to +200°C for stabilized wafer tests.
- Air-Cooled Technology: No need for external cooling liquids, reducing maintenance efforts and increasing flexibility.
- Energy Efficiency: Optimizes energy consumption through inverter-controlled cooling and coolant recovery.
- Air Purge Control: Enhances control over the air conditions around the wafer prober for more accurate test results.
- Versatile Compatibility: The system is compatible with various wafer prober models, allowing it to be tailored to different semiconductor production requirements.
Maximize the Efficiency of Your Wafer Testing with the ARTS-HS-III Cooling System
Leverage the benefits of the ARTS-HS-III system to optimize the quality of your wafer testing while benefiting from easier maintenance and reduced energy consumption.
Learn more about this advanced air-cooled cooling system and how it can improve your semiconductor production processes.





















