High-Precision Wafer Prober for Tomorrow’s Demands
AP3000 / AP3000e
The AP3000 wafer prober series combines state-of-the-art precision technology with an intelligent automation concept. Designed for high-throughput, demanding test environments, it delivers extremely accurate and stable measurement results—even for sensitive test parameters.
The AP3000 and AP3000e models provide reliable prober performance with minimized vibration and noise, integrated with cutting-edge software architecture that redefines safety and system integration.
Technological Highlights
- Highest Accuracy – For fine structures and complex test applications
- Minimal Vibration & Quiet Operation – Ideal for sensitive testing environments
- High Throughput – Optimized indexing movements and wafer alignment
- Intuitive Operation – For fast setup and smooth operation
- Enhanced Security – With pre-installed antivirus/malware software
Customizable Options – At a Glance:
- • Probing Options:
- Automatic Needle Cleaner (Cleaning Wafer / Cleaning Unit)
- HF Jig / Manipulator
- Auto Probe Card Exchange (APC)
- Wafer Handling & Environment:
- Dual Loader or AMHS Integration
- Fan Filter Unit (Mini-Environment)
- Chuck Options: Ambient, Hot Temp., Low Temp., Low Noise
- Cassette & Wafer ID Reader (Top/Back Surface)
- Network & Interfaces:
- Prober Network (Veganet, Light-Veganet, Vega-Planet, GEM)
- GB-IB Interface
- PCAS – Automatic Probe Card Setup
Perfect for Modern Manufacturing Processes
Whether in research, development, or high-volume production, the AP3000 series adapts to any environment. With robust performance, high flexibility, and smart automation, it is a future-proof tool for semiconductor testing.
We would be happy to advise you on the ideal configuration of the AP3000 series—tailored to your processes, volume, and testing environment.
Maximum performance with the right machine accessories:
Find efficient cooling systems for your Prober process.
ARTS-HS-II: High-Speed Cooling System for Probing systems →
ARTS-HS-III: Efficient Air-Cooled Cooling System for Probing Systeme →
ARTS-HS-III-WA: Air-Water Cooling System for Probing Systeme →
