Fully automatic Wafer Prober for a high throughput – for 120 to 200 mm wafers

Micrometer precision positioning control

Exact determination of the temperature

Highly efficient Multi-Pin Probing
  • Precision +-1.5 µm, with the newest optics to determine the positioning precision
  • Ultra-stable Z/θ platform for Multi-Pin Probing Contact
  • Precise control of the surrounding temperature – optionally with Low Temperature Chuck or Hot Chuck
  • High flexibility – numerous options such as the double loader
  • Simple operation – multifunctional display and touch screen operation
  • Each drive axis can be separately controlled – for optimum control of each individual component

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