Automated 200 mm Wafer Prober
UF200R
The UF200R wafer prober is a versatile, fully automated prober designed for 120 to 200 mm wafers, intended for continuous use in high-dynamic production or development environments. With the latest software and electronic architecture, it is state-of-the-art and offers the highest flexibility for a wide range of applications—from standard chips to MEMS wafers.
Its high speed, expandable features, and the option to integrate special functions make the UF200R a future-proof wafer prober for anyone needing precise, fast, and stable wafer testing.
Technical Highlights of the Prober
- Wafer Sizes: 120 mm, 150 mm, 200 mm
- Motion Speeds
- XY Axis: up to 300 mm/s
- Z Axis: up to 30 mm/s
- Rotation Angle: ±5°
- Automated Handling:
- Precise robotic arm for efficient wafer movement
- Backside holding for sensitive wafer structures
- Optional second card feeder for higher throughput
- Easy Integration of Special Applications:
- MEMS
- Non-standardized formats and testing requirements
- Flexible retrofitting options
Why the UF200R is the ideal prober for you!
- Reliable continuous operation in demanding test environments
- Modular design for long-term expandability/li>
- Uncompromising performance with consistent test quality
- Suitable for development, production & special applications
Do you need a flexible probing system that grows with your requirements? The UF200R offers everything you need for modern 200 mm wafer testing.
Explore Our Full Product Line
Download the product overview to see how our solutions can support your needs.
Detailed insights into Probing technology
Read our whitepaper about rethinking semiconductor test environments to match real-world applications.
Maximum performance with the right machine accessories:
Find efficient cooling systems for your Prober process.
ARTS-HS-II: High-Speed Cooling System for Probing systems →
ARTS-HS-III: Efficient Air-Cooled Cooling System for Probing Systeme →
ARTS-HS-III-WA: Air-Water Cooling System for Probing Systeme →
