Automated 200 mm Wafer Prober
UF200R
The UF200R wafer prober is a versatile, fully automated prober designed for 120 to 200 mm wafers, intended for continuous use in high-dynamic production or development environments. With the latest software and electronic architecture, it is state-of-the-art and offers the highest flexibility for a wide range of applications—from standard chips to MEMS wafers.
Its high speed, expandable features, and the option to integrate special functions make the UF200R a future-proof wafer prober for anyone needing precise, fast, and stable wafer testing.
Technical Highlights of the Prober
- Wafer Sizes: 120 mm, 150 mm, 200 mm
- Motion Speeds
- XY Axis: up to 300 mm/s
- Z Axis: up to 30 mm/s
- Rotation Angle: ±5°
- Automated Handling:
- Precise robotic arm for efficient wafer movement
- Backside holding for sensitive wafer structures
- Optional second card feeder for higher throughput
- Easy Integration of Special Applications:
- MEMS
- Non-standardized formats and testing requirements
- Flexible retrofitting options
Why the UF200R is the ideal prober for you!
- Reliable continuous operation in demanding test environments
- Modular design for long-term expandability/li>
- Uncompromising performance with consistent test quality
- Suitable for development, production & special applications
Do you need a flexible probing system that grows with your requirements? The UF200R offers everything you need for modern 200 mm wafer testing.
