Fully Automatic Wafer Prober for 100–200 mm Wafers
High-speed, modular probing with robotic handling and advanced precision — ideal for MEMS, special formats, and mass production.
The UF190R from Accretech is a fully automatic wafer prober designed for wafer sizes from 100 mm up to 200 mm. It impresses with high speed, modularity, and a broad application range — from standard tests to specialized requirements such as MEMS wafer handling.
Thanks to the latest generation of software and electronics, the UF190R offers even greater precision, efficiency, and compatibility with current testing needs. For maximum flexibility, the system can be upgraded anytime with various options.
- Now with the latest SW and Electronics generation
- Also available for numerous special applications, such as MEMS wafer handling
- Highest speed 300 mm/s in the XY-axis, 30 mm/s in the Z-axis, rotation angle +-5 deg
- With second card feeder as an option
- Wafer Handling with robot arm and backside holding
