Highly Precise Polish Grinder for Wafer Thinning and Defect Removal up to 300 mm

Integrated thinning and polishing processes in one system for maximum efficiency and flawless results in high-volume manufacturing

The PG3000RMII from ACCRETECH is a highly precise polish grinder solution that combines wafer thinning and defect removal for wafers up to 300 mm in a single system. By integrating multiple process steps into one device, the system achieves maximum efficiency and stable results – ideal for use in high-volume manufacturing.

Maximum Efficiency Through Integrated Processes

  • Two processing steps in one machine: thinning and polishing
  • Flawless results thanks to stable process control
  • Wafer thinning down to 15 µm thickness – for modern applications with ultra-thin substrates
  • High throughput for mass production
  • All processes on one chuck – no wafer transfer necessary

The RM200/300 module optimally supports polish grinding by:

  • • Removing protective tape from thin wafers
  • Precisely mounting wafers onto dicing frames

Our product experts are happy to advise you regarding the PG3000RMII polish grinder!

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