High Rigid Grinding

Precision Grinding for Hard Wafer Materials

As alternative semiconductor materials like silicon carbide (SiC), gallium nitride (GaN), and sapphire become increasingly important, the demands on wafer grinding continue to rise. ACCRETECH’s High Rigid Grinding systems are engineered specifically for these ultra-hard materials. Thanks to their extremely rigid and low-vibration design, they ensure maximum grinding precision and process stability – even with ultra-thin wafers.

Key Benefits of High Rigid Grinding:

  • Maximum Precision: Accurate material removal even on ultra-thin wafers
  • Increased Throughput: Enhanced surface preparation enables faster wafer dicing
  • Reduced Tool Wear: Optimized grinding processes extend tool life
  • Minimized Risk: Lower probability of microcracks and chipping
  • Process Integration: Ideal for downstream steps such as edge grinding or CMP

Overview of Our High Rigid Grinding Systems:

High Rigid Grinder – For Wafers ≤ 200 mm

High Rigid Grinder – For Wafers ≤ 300 mm

High Rigid Grinder – For Wafers ≤ 200 mm

HRG200X: High-performance grinder designed for hard materials. Capable of grinding a SiC wafer down to 120 µm in just one minute.
Learn more about HRG200X →

High Rigid Grinder – For Wafers ≤ 300 mm

HRG300: Semi-automatic grinding machine with maximum process reliability.
Learn more about HRG300 →

HRG300A: Fully automatic grinding machine with maximum stability for continuous industrial operation.
Learn more about HRG300A →

HRG3000RMⅡ: Fully automatic high-rigidity 3-axis grinding machine for precise processing of wafers up to 300 mm.
Learn more about HRG3000RMⅡ →