Fully Automatic Wafer Prober for 100–200 mm Wafers
High-speed, modular probing with robotic handling and advanced precision — ideal for MEMS, special formats, and mass production.
The UF190R from Accretech is a fully automatic wafer prober designed for wafer sizes from 100 mm up to 200 mm. It impresses with high speed, modularity, and a broad application range — from standard tests to specialized requirements such as MEMS wafer handling.
Thanks to the latest generation of software and electronics, the UF190R offers even greater precision, efficiency, and compatibility with current testing needs. For maximum flexibility, the system can be upgraded anytime with various options.
UF190R Highlights at a Glance
- Wafer sizes: 100 mm, 120 mm, 150 mm, 200 mm
- Probing speed:
- XY axis: up to 300 mm/s
- Z axis: up to 30 mm/s
- Rotation: ±5°
- Robust handling
- Backside holding for sensitive structures
- Robotic arm for precise and gentle wafer manipulation
- Upgradeable & future-proof
- Optional second load cassette
- Latest software and electronics platform
- Suitable for special formats and MEMS wafers
- High operational reliability: Stability for continuous operation and easy integration into existing test processes
Application Areas of the UF190R Wafer Prober
- Development & quality assurance
- Mass production of devices on 200 mm wafers
- MEMS and specialty wafer testing
- University research & labs with automated testing requirements
Interested in integrating the UF190R into your test environment or have special requirements? Our experts are happy to assist you with selection and configuration.
